TSMC CEO said the company has acquired high-numerical-aperture (high-NA) EUV
lithography tools for R&D, but their high cost means they are not required for
production at present.
2026-06-04
TSMC CEO said the company has acquired high-numerical-aperture (high-NA) EUV
lithography tools for R&D, but their high cost means they are not required for
production at present.